Cathodoluminescence is a spectroscopic method which allows the identification, on a local scale, of defects and impurities responsible for luminescence properties of a material bombarded by an electron gun. The wavelength of the detected photons is situated in the infrared (IR), visible and ultraviolet (UV) domains of the electromagnetic spectrum.
Fields of application are microelectronics, semiconducting, insulating materials, geology and mineralogy.
- Optical microscope equipped with a low-light camera.
- A vacuum chamber with motorized sample holder.
- Double stage vacuum pump and accessories.
- An electron gun with its cable.
- PC controlled control electronics - USB port.
- Control of plasma stability from 1kV to 20kV and 50 to 400µA.
- Automated image capture.
- Semi-quantitative measurement.
- Quantitative measurement with spectrometer.
- High spatial resolution < 1µm.
- Optional: Heating and/or cooling.